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Markku, Tilli

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Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

by Markku, Tilli

fromMicro & nano technologies

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Micro-Electrical-Mechanical S… (1) Microelectromechanical systems (1) Microelectromechanical system… (1) Microsystèmes électromécaniqu… (1) Microsystèmes électromécaniqu… (1) Silicon -- Electric properties (1)

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Markku, Tilli (1)

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William Anderew is an imprint… (1)

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2015 (1)

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