Highly conductive (3.0 - 5.0 x 10 \(^{-4}\) \( Ω\) cm) and transparent (80 – 85% ) ITO films were successfully fabricated on glass and polymer substrates (PET, PEN and PC) by pulsed laser deposition at low temperatures (24 – 150 °C). The influence of deposition conditions on the…
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