Tilli, Markku

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Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

by Lindroos, Veikko, Tilli, Markku, Motooka, Teruaki, Airaksinen, Veli-Matti, Franssila, Sami, Paulasto-Kröckel, Mervi

fromMicro & nano technologies

0 Type: Book

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEM…

Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

by Tilli, Markku

0 Type: Book

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEM…