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Focused ion beam systems: basics and applications
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Type: Book
Interactions of ions with matter / Nobutsugu Imanishi -- Gas assisted ion beam etching and disposition / Hyoung Ho (Chris) Kang, Clive Chandler, and Matthew Weschler -- Imaging using electrons and ion beams / Kaoru Ohya and Tohru Ishitani -- Characterization methods using FIB/SE…
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modifica…