Rates of chemical-mechanical planarization (CMP) are dependent largely on tribology in the process of wear on nanosurfaces. To address the needs of researchers needing more information in either or both CMP and tribology, the authors first present the basic processes associated,…
"As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circu…
This book provides insights into modern grinding technology based on wide research and experience. It provides a concise treatment of the principles involved and shows how these lead on to the latest technology developments. The reader learns how to achieve high precision, fast …
This book provides insights into modern grinding technology based on wide research and experience. It provides a concise treatment of the principles involved and shows how these lead on to the latest technology developments. The reader learns how to achieve high precision, fast …
Principles of modern grinding technology
This book provides insights into modern grinding technology based on wide research and experience. It provides a concise treatment of the principles involved and shows how these lead on to the latest technology developments. The reader learns how to achieve high precision, fast …
Concise authoritative treatment of precision grinding processes showing the way to step improvements in accuracy, quality, removal rates and costs.
This book provides insights into modern grinding technology based on wide research and experience. It provides a concise treatment of the principles involved and shows how these lead on to the latest technology developments. The reader learns how to achieve high precision, fast …