"This book is both aimed at post-graduate researchers seeking an overview of this field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts ar…
"Nanoscale miniaturization and femtosecond laser-pulse spectroscopy require a quantum mechanical description of the carrier kinetics that goes beyond the conventional Boltzmann theory. On these extremely short length and time scales the electrons behave like partially coherent w…
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
Das Werk bietet ein umfangreiches Wissen über diskrete und integrierte Bauelemente der Halbleitertechnik. Beim Entwurf elektronischer Schaltungen sind gründliche Kenntnisse über eingesetzte Bauelemente erforderlich, um sowohl technisch als auch wirtschaftlich beste Lösungen zu f…
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography. Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techn…
