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Deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. This book includes an overview of …
This reference is a comprehensive survey of advanced motion control techniques for mechatronic systems, written by authorities in the field. This book systematically describes the developed control technologies for the respective modes in detail, and presents the effectiveness o…
