Microfabrication

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Three projects are described in this thesis that combine microfabrication techniques with optical micromanipulation. The aim of these projects is to use expertise in microlithography and optical tweezing to create new tools for Lab-on-Chip devices. The first project looks at the…

Introduction / Rajendra M. Patrikar -- Filter design / Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar -- Microelectromechanical resonators design : low-frequency resonators / Amol Morankar -- Microelectromechanical resonator design for high frequency / Prasanna Deshp…

This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in vario…