This book contains selected papers presented at MAMM 2010, the First Workshop on Microactuators and Micromechanisms. This workshop has brought together scientists, industry experts and students and has provided a special opportunity for know-how exchange and collaboration in var…
This book is an overview of replication technology for micro- and nanostructures, focusing on the techniques℗ and technology of hot embossing, a scaleable and multi-purpose technology for the manufacture of devices such as BioMEMS and microfluidic devices which are expected to r…
by Bruhns, O. T., IUTAM Symposium on Micro- and Macrostructural Aspects of Thermoplasticity, Bochum, Alemanya), Stein, Erwin
fromSolid mechanics and its applications
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry …
