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Controlling mechanical systems is an important branch of mechanical engineering. In this thesis, we will study the effect of delayed feedback controller on stabilizing MEMS resonators. Firstly, we apply a delayed feedback velocity controller on a MEMS resonator which is actuated…
First, this research presents experimental and theoretical investigation of the response of micro scale dual-plate thermal-piezoresistive resonators (TPR) and self-sustained oscillators (TPO) to different gases and pressures. It is demonstrated that the resonant frequency of suc…