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Focusing on the machining of ceramic materials such as silicon nitride, silicon carbide, and zirconia, this handbook meets the growing need in industry for a clear understanding of modern improvements in ceramic processing. The presentation is international in scope, with techni…
"As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circu…