Plasma processing for VLSI
by Einspruch, Norman G., Brown, Dale M.
fromVLSI electronics
An excellent senior/graduate text covering semiconductor fundamentals through telecommunications and computing devices.
"From semiconductor fundamentals to state-of-the-art semiconductor devices used in the telecommunications and computing industries, this book provides a solid grounding in the most important devices used in the hottest areas of electronic engineering today. The book includes cov…
« Advanced semiconductor fundamentals, Second Edition, by Robert F. Pierret is an advanced level presentation of the underlying functional formalism routinely used in describing the operational behavior of solid state devices. »--
This is an advanced level presentation of the underlying functional formalism routinely used in describing the operational behavior of solid state devices.
Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more …