Microcantilever based sensors have been under intense research focus for more than a decade due several advantages including high sensitivity, quick response, low cost, and ability to be miniaturized in small module. The microcantilever surface is usually functionalized (coated …
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The main objective of this dissertation is to comprehensively analyze vibration characteristics of microcantilever-based sensors with application to ultra small mass detection and low dimensional materials characterization. The first part of this work focuses on theoretical deve…