The main thrust of this thesis is the investigation of a Focused Ion Beam (FIB)-based approach for fabricating p+-n shallow junctions approaching the nanometer scale (15-50 nm) which will be compatible with future generation CMOS technology. Ultra shallow junctions are formed by…
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In Chapter 1, a brief recount of the pyridine diimine (PDI) Al chemistry that has been accomplished in the Berben lab has been provided. Furthermore, the electronic structure of these compounds is presented in the context of metalloaromaticity. The metalloaromatic class of compo…