Developments in surface contamination and cleaning

Developments in surface contamination and cleaning: cleanliness validation and verification

by Albert, David E. Kohli, Rajiv Mittal, K. L.

Type Book
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As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book seri.

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Title Statements

  • Full title :Developments in surface contamination and cleaning. : cleanliness validation and verification / edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others].

Summary

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book seri.

Read More ↓

Edition Statements

  • Publication Date:2015.
  • Edition:First edition

Publication Statements

  • Publisher(s):William Andrew
  • Place of Publication:Kidlington, England
  • Language:eng
  • Publication Date:2015.

The Physical Object

  • Description:1 online resource (207 pages) : : illustrations, tables.

Edition Identifiers

  • ISBN:9780323311458, 0323311458
  • oclc:ocn964801986
  • Dewey Decimal:620.44

Subjects

Surface contamination -- Prevention Surfaces (Technologie) Surfaces (Technology)

Writers

Albert, David E. Kohli, Rajiv Mittal, K. L.

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