Digital holography for MEMS and microsystem metrology

by Asundi, Anand

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

Edition Statements

  • Publication Date:2011.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:Chichester, West Sussex, U.K
  • Language:eng
  • Publication Date:2011.

The Physical Object

  • Description:xxii, 205 p. : : ill., port.

Edition Identifiers

  • oclc:on1261987409
  • LC Classification:TK7875
  • Dewey Decimal:621.381

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