Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

Edition Statements

  • Publication Date:2011.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:Chichester, West Sussex, U.K
  • Language:eng
  • Publication Date:2011.

The Physical Object

  • Description:1 online resource (xxii, 205 p.) : : ill., port.

Edition Identifiers

  • ISBN:9780470978696, 0470978694, 9781119972785, 1119972787, 9781119972792, 1119972795, 9781119997290, 1119997291, 9781119997306, 1119997305, 9781119997306, 1119997305
  • oclc:ocn929349418
  • LC Classification:TK7875
  • Dewey Decimal:621.381

Writers

Asundi, Anand

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