Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand K.

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

Edition Statements

  • Publication Date:cop. 2011.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:Chichester (GB)
  • Language:eng
  • Publication Date:cop. 2011.

Notes

Sommaire et résumé disponibles sur le site de l'éditeur à l'adresse.

The Physical Object

  • Description:1 vol. (XXII-205 p.) : : ill. ; : 24 cm.

Edition Identifiers

  • ISBN:9780470978696 (rel), 0470978694 (rel)
  • oclc:ocn801010007
  • LC Classification:TK7875
  • Dewey Decimal:621.381

Subjects

Essais par holographie Holographic testing Image processing -- Digital techniques Microelectromechanical systems -- Measu… Microelectronics -- Measurement Microélectronique -- Mesure Systèmes microélectromécaniques -- Mesu…

Writers

Asundi, Anand K.

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