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Microélectronique -- Mesure

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Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand K.

fromWiley microsystem and nanotechnology series

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Essais par holographie (1) Holographic testing (1) Image processing -- Digital t… (1) Microelectromechanical system… (1) Microelectronics -- Measureme… (1) Microélectronique -- Mesure (1) Systèmes microélectromécaniqu… (1)

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Asundi, Anand K. (1)

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Wiley (1)

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2011 (1)

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