Lithography process control

Lithography process control

by Levinson, Harry J.

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Title Statements

  • Full title :Lithography process control / Harry J. Levinson.

Edition Statements

  • Publication Date:©1999.

Publication Statements

Notes

Bibliogr. p. 169-188. Index.

The Physical Object

  • Description:X-190 p. : : illustrations ; : 26 cm

Edition Identifiers

  • ISBN:0819430528, 9780819430526
  • oclc:ocn468419440
  • Dewey Decimal:621.381 5

Subjects

Microlithographie -- Qualité Semiconducteurs -- Attaque à l'acide

Writers

Levinson, Harry J.

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