Lithography process control
This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
Read More ↓Title Statements
- Full title :Lithography process control / Harry J. Levinson.
Summary
This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
Read More ↓Edition Statements
- Publication Date:©1999.
Publication Statements
- Publisher(s):SPIE Optical Engineering Press
- Place of Publication:Bellingham, WA
- Language:eng
- Publication Date:©1999.
Notes
Title from table of contents page (viewed Aug. 24/11).
The Physical Object
- Description:1 online resource (196 pages).
Edition Identifiers
- ISBN:9781615837366, 1615837361, 9780819430526, 0819430528
- oclc:ocn858443711
- LC Classification:TK7871.85
- Dewey Decimal:621.38152 L665 1999 [ONLINE]
Table of Contents
Chapter 1; Chapter 2; Chapter 3; Chapter 4; Chapter 5; Chapter 6; Chapter 7; Chapter 8; Chapter 9; Index
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