Plasma Chemistry III

Plasma Chemistry III

by Stanislav Veprek

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Title Statements

  • Full title :Plasma Chemistry III / Stanislav Veprek.

Edition Statements

  • Publication Date:1980.

Publication Statements

  • Publisher(s):Springer Berlin Heidelberg
  • Place of Publication:Place of publication not identified
  • Language:eng
  • Publication Date:1980.

The Physical Object

  • Description:1 online resource

Edition Identifiers

  • ISBN:9783540382645, 354038264X
  • DOI:10.1007/BFb0048584
  • oclc:ocn467786542
  • LC Classification:QD1
  • Dewey Decimal:541

Table of Contents

Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization -- The Mechanism and kinetics of plasma polymerization -- Elementary processes at solid surfaces immersed in low pressure plasmas.

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Subjects

Plasma chemistry Plasmachimie

Writers

Stanislav Veprek

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