Title Statements
- Full title :Semiconductor manufacturing technology / Chue San Yoo ...
Edition Statements
- Publication Date:©2008.
Publication Statements
- Publisher(s):World Scientific
- Place of Publication:Hackensack (N.J.)
- Language:eng
- Publication Date:©2008.
Notes
Bibliogr. p. 453-464.
The Physical Object
- Description:1 v. (XII-470 p.) : : illustrations ; : 24 cm
Edition Identifiers
- ISBN:9812568239, 9789812568236
- oclc:ocn470787535
- LC Classification:TK7871.85 Y66 2008
- Dewey Decimal:621.381 52
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