Semiconductor manufacturing technology

Semiconductor manufacturing technology

by Yoo, Chue San

Type Book
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Title Statements

  • Full title :Semiconductor manufacturing technology / Chue San Yoo ...

Edition Statements

  • Publication Date:©2008.

Publication Statements

  • Publisher(s):World Scientific
  • Place of Publication:Hackensack (N.J.)
  • Language:eng
  • Publication Date:©2008.

Notes

Bibliogr. p. 453-464.

The Physical Object

  • Description:1 v. (XII-470 p.) : : illustrations ; : 24 cm

Edition Identifiers

  • ISBN:9812568239, 9789812568236
  • oclc:ocn470787535
  • LC Classification:TK7871.85 Y66 2008
  • Dewey Decimal:621.381 52

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