Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

Type Book
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Title Statements

  • Full title :Silicon processing for the VLSI era. / Richard N. Tauber.

Edition Statements

  • Publication Date:©2000.
  • Edition:2. ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach, California
  • Language:eng
  • Publication Date:©2000.

The Physical Object

  • Description:890 s. : : illustrations, diagram, table

Edition Identifiers

  • ISBN:0961672161, 9780961672164
  • oclc:ocn924022224

Subjects

Halvledare Integrated circuits Integrerade kretsar Kisel manufacturing Semiconductors Silicon Tillverkning VLSI

Writers

Wolf, Stanley Tauber, Richard N.

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