Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:©2000->

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach, Calif
  • Language:eng
  • Publication Date:©2000->

Notes

JM20000323.

The Physical Object

  • Description:volumes <1-> : : illustrations ; : 25 cm

Edition Identifiers

  • ISBN:9780961672164, 0961672161
  • oclc:ocm43698493
  • LC Classification:TK7874
  • Dewey Decimal:621.381.53

Table of Contents

v. 1. Process technology.

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Subjects

Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Silicium Silicium -- Applications industrielles Silicon

Writers

Wolf, Stanley Tauber, Richard N.

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