Ultra-clean technology handbook

Ultra-clean technology handbook

by Ōmi, Tadahiro

Type Book
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Title Statements

  • Full title :Ultra-clean technology handbook. / edited by Tadahiro Ohmi.

Edition Statements

  • Publication Date:2019.

Publication Statements

  • Publisher(s):CRC Press
  • Place of Publication:Boca Raton
  • Language:eng
  • Publication Date:2019.

The Physical Object

  • Description:1 volume ; : 25 cm

Edition Identifiers

  • ISBN:9780367402341, 0367402343
  • oclc:on1120066836
  • Dewey Decimal:621.38152

Subjects

Fabrication -- Nettoyage Manufacturing processes -- Cleaning Plaquettes à gravure en semi-conducteur… Semiconductor wafers -- Cleaning

Writers

Ōmi, Tadahiro

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Files & Downloads

  • Ultra-Clean Technology Handbook: Volume 1: Ultra-…

    PDF · 47.9 MB · updated
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