Title Statements
- Full title :Ultraclean technology handbook. / edited by Tadahiro Ohmi.
Edition Statements
- Publication Date:ß1993
Publication Statements
- Publisher(s):Marcel Dekker Inc
- Place of Publication:New York, New York
- Language:eng
- Publication Date:ß1993
The Physical Object
- Description:1 online resource (928 pages) : : illustrations, tables.
Edition Identifiers
- ISBN:1351406434, 9781351406437
- oclc:on1016968766
- LC Classification:TS183
- Dewey Decimal:670.42
Subjects
Writers
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