Ultraclean technology handbook

Ultraclean technology handbook

by Ōmi, Tadahiro

Type Book
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Title Statements

  • Full title :Ultraclean technology handbook. / edited by Tadahiro Ohmi.

Edition Statements

  • Publication Date:ß1993

Publication Statements

  • Publisher(s):Marcel Dekker Inc
  • Place of Publication:New York, New York
  • Language:eng
  • Publication Date:ß1993

The Physical Object

  • Description:1 online resource (928 pages) : : illustrations, tables.

Edition Identifiers

  • ISBN:1351406434, 9781351406437
  • oclc:on1016968766
  • LC Classification:TS183
  • Dewey Decimal:670.42

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