This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.
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This book addresses environmental changes and how they reconfigure society's relationship to the future. It argues that Man does not build "his" future alone: instead, environmental changes are also proof of the future-making capacity of non-human beings. The author elaborates o…
