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Micromanufacturing engineering and technology
by Qin, Yi
fromMicro and nano technologies series
0
Type: Book
Cover -- Half Title -- Title -- Copyright -- Contents -- Foreword -- Preface -- Authors -- Chapter 1 Forming Directed Fluxes of Low-Temperature Plasma with High-Voltage Gas Discharge outside the Electrode Gap -- 1.1 Overview of Devices Used for Generating Low-Temperature High-Vo…