"Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in …
"Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in …
The first edited volume to address this rapidly growing field, Modeling and Control for Micro/Nano Devices and Systems gives control engineers, lab managers, high-tech researchers, and graduate students easy access to the expert contributors' cutting-edge knowledge of micro/nano…
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry …
This book describes electrochemical micromachining (EMM). It covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications; explores the trend of decreasing size of fabricated dev…
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of mater…
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of mater…
This book provides comprehensive coverage of the fundamental design principles and validation for implantable microsystems, as well as several major application areas. Each component in an implantable device is described in detail, and major case studies demonstrate how these sy…
This book provides comprehensive coverage of the fundamental design principles and validation for implantable microsystems, as well as several major application areas. Each component in an implantable device is described in detail, and major case studies demonstrate how these sy…