This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millim…
Due to the enormous impact of mechatronics systems, we encounter mechatronics and micromechatronic systems in our daily activities. Recent trends and novel technologies in engineering have increased the emphasis on integrated analysis, design, and control. This book examines mot…
Advanced MEMS/NEMS fabrication and sensors
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second se…
Reliability of high-power mechatronic systems
Reliability of high-power mechatronic systems
This second volume of a series dedicated to the reliability of high-power mechatronic systems focuses specifically on issues, testing and analysis in automotive and aerospace applications. In the search to improve industrial competitiveness, the development of methods and tools …
Reliability of high-power mechatronic systems
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechani…
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particula…