This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millim…
Micro-Cutting: Fundamentals and Applications comprehensively covers the state of the art research and engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially in modern micro-manufacturing, ultraprecision manufacturing and high val…
Micro-Cutting: Fundamentals and Applications comprehensively covers the state of the art research and engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially in modern micro-manufacturing, ultraprecision manufacturing and high val…
"Imprimantes 3D, découpeuses laser, logiciels et matériels open source sont désormais à la portée de tous et fabriquer des objets, chez soi comme à son bureau, va rapidement devenir aussi courant que de retoucher des photos... La démocratisation des outils de production va-t-ell…
1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and…
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical--based silicon bulk micromachini…
Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both p…
