Basistechnologien: Reinraumtechnologie - Substrate und Materialien der Mikrosystemtechnik - Dünnschichttechnologie - Lithographie - Planare Mikrostrukturierung - Dreidimensionale Mikrostrukturierung - Grundstrukturen und Anwendungen - Aufbau- und Verbindungstechniken, Konzepte z…
This book is an overview of replication technology for micro- and nanostructures, focusing on the techniques and technology of hot embossing, a scaleable and multi-purpose technology for the manufacture of devices such as BioMEMS and microfluidic devices which are expected to re…
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and des…
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and des…
Microelectronics, microsystems and nanotechnology: papers presented at MMN 2000, Athens, Greece, 20-…
by Conference on "Microelectronics, Microsystems, and Nanotechnology", Athens, Greece), Nassiopoulou, Androula G., Instituto Mikroēlektronikēs, Conference on Microelectronics, Microsystems and Nanotechnology, Athen, MMN, Athens, Greece)
Advanced microsystems for automotive applications 2009: smart systems for safety, sustainability, and com…
by Meyer, Gereon, Valldorf, Jürgen, Gessner, Wolfgang, European Technology Platform on Smart Systems Integration, International Forum on Advanced Microsystems for Automotive Applications, Berlin), AMAA, Berlin
Advanced microsystems for automotive applications 2009: smart systems for safety, sustainability, and com…
by Meyer, Gereon, Valldorf, Jürgen, Gessner, Wolfgang, European Technology Platform on Smart Systems Integration, International Forum on Advanced Microsystems for Automotive Applications, Berlin)
The upcoming change of costumers' preferences and state regulations towards safety, sustainability and comfort of a car is calling the automotive industry to make the necessary innovations available in order to accelerate its pace on the way out of the economic crisis. Smart min…
