3D and circuit integration of MEMS
3D and Circuit Integration of MEMS
"Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in …
"Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in …
Harvesting kinetic energy is a good opportunity to power wireless sensor in a vibratory environment. Besides classical methods based on electromagnetic and piezoelectric mechanisms, electrostatic transduction has a great perspective in particular when dealing with small devices …
Beginning with a comprehensive survey of existing semiconductor-based chemical microsensors and microsystems, this book proceeds to describe in detail CMOS technology-based chemical microsensor systems. The benefits of using CMOS-technology for developing chemical microsensor sy…
"This book, "Integrated Chemical Microsensor Systems in CMOS Technology," provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at scientists and engineers who are interested in gaining an introduction to th…
Micromechanics and microactuators: proceedings of MAMM 2010, Aachen, Germany, May 27…
by International Federation for the Promotion of Mechanism and Machine Science, Ananthasuresh, Gondi Kondaiah, Corves, Burkhard, Petuya, Victor, Workshop on Microactuators and Micromechanisms, Aachen, MAMM, Aachen
fromMechanisms and Machine Science
Microsystems and nanotechnology
Sensors and microsystems: AISEM 2011 proceedings ; [the 16th AISEM ("Associ…
by Di Natale, Corrado, D'Amico, Arnaldo, Mosiello, Lucia, Zappa, Giovanna, Italian Conference on Sensors and Microsystems, Rom, Associazione Italiana Sensori e Microsistemi, AISEM Conference, Rome, National Conference of the Associazione Italiana Sensori E Microsistemi, Rome, National Conference on Sensors and Microsystems, Rome
fromLecture notes in electrical engineering
Advanced microsystems for automotive applications 2010: smart systems for green cars and safe mobility
by Meyer, Gereon, Valldorf, Jürgen, European Technology Platform on Smart Systems Integration, International Forum on Advanced Microsystems for Automotive Applications, Berlin)
fromVDI