An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
Introduction to microlithography: theory, materials, and processing
by Bowden, M. J., American Chemical Society., Division of Organic Coatings and Plastics Chemistry, American Chemical Society., Meeting, Seattle, Wash.), Thompson, L. F., Willson, C. G., (C. Grant)
fromACS symposium series (En ligne)
This book is a collection of invited papers (previously published in special issues of the Journal of Adhesion Science and Technology) written by internationally recognized researchers actively working in the field of plasma surface modification. It provides a current, comprehen…