Plasma processing for VLSI
by Einspruch, Norman G., Brown, Dale M.
fromVLSI electronics
0
Type: Book
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Plasma processing for VLSI
by Einspruch, Norman G., Brown, Dale M.
fromVLSI electronics
0
Type: Book
Plasma Processing for VLSI.
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.