quadrupole mass analyzer

SI

Secondary ion mass spectrometry: applications for depth profiling and surface char…

by Stevie, F. A.

fromMaterials characterization and analysis collection

0 Type: Book

Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a …