Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more …
Plasma processing for VLSI
by Einspruch, Norman G., Brown, Dale M.
fromVLSI electronics
"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divid…
« Advanced semiconductor fundamentals, Second Edition, by Robert F. Pierret is an advanced level presentation of the underlying functional formalism routinely used in describing the operational behavior of solid state devices. »--
This is an advanced level presentation of the underlying functional formalism routinely used in describing the operational behavior of solid state devices.
An excellent senior/graduate text covering semiconductor fundamentals through telecommunications and computing devices.