Thesiss

Understanding the behavior and modes of failure of micro-electro-mechanical systems (MEMS) under different conditions is a crucial element to enhance their reliability and sensitivity, which may also lead to widen their use to more applications. One of the major causes of failur…

Controlling mechanical systems is an important branch of mechanical engineering. In this thesis, we will study the effect of delayed feedback controller on stabilizing MEMS resonators. Firstly, we apply a delayed feedback velocity controller on a MEMS resonator which is actuated…

First, this research presents experimental and theoretical investigation of the response of micro scale dual-plate thermal-piezoresistive resonators (TPR) and self-sustained oscillators (TPO) to different gases and pressures. It is demonstrated that the resonant frequency of suc…