The modeling of micromechanical systems (MEMS) under shock conditions can be an extremely difficult task for MEMS engineers. Overall, this field of research is multiphasic nature, since different physical phenomena are strongly intertwined at microscale. This work concentrates o…
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We developed a novel large-stroke deformable mirror for focus control and spherical aberration correction. The mirrors fabricated using MEMS technology provide full range (150-200 μm in tissue) of focus scanning at high numerical aperture (N.A.=0.5-0.7) for confocal microscopy a…
Scope and Method of Study. Described is an uncooled surface-micromachined thermoelectric (TE) infrared detector that features P-doped polysilicon/Nichrome (Cr20-Ni80) as the thermocouple material pair embedded in Parylene-N, which isolates the hot junction from the substrate. Si…
Silicon technologies have been the foundation building blocks of integrated digital and analog electronic circuits for almost four decades. Complementary Metal Oxide Semiconductor (CMOS) is an important silicon technology that is being used to create MicroElectroMechanical syste…
This dissertation presents an investigation into dynamic instabilities and bifurcations in MEMS devices actuated electrostatically and their use to achieve new methods and functionalities for mass and acceleration sensing and detection. These instabilities are induced into a MEM…
The development of micromachining technologies has provided wide applications in micro sensing and actuation. However, most of the demonstrated devices are selectively constructed by fabrication processes that are limited to complexity, configuration, dimension, and material var…
The research topics of the dissertation involve the design and the acoustic response prediction of MEMS silicon microphones. A directional microphone and an omnidirectional microphone were designed to meet the performance targets such as the desired sensitivity, frequency respon…
A novel differential microphone design has been proposed by Miles et al. based on the ears of the fly Ormia ochracea . An important aspect of the overall package design for this microphone is the design of a cover to protect the microphone diaphragm from the effects of dust and …
MEMS-scale vibration energy harvesters have gained attention as an energy source for low-power electronics. A great deal of research focuses on increasing power generation. This paper proposes a band-pass filter for improved bandwidth and mounting a MEMS energy harvester on a pr…
In this dissertation, we study the impact of the common imperfections encountered in micromachined clamped-clamped beams, bridges, on their static and dynamic behavior. These include flexible supports, capillary forces, and initial curvature due to residual stresses. The last ef…
This dissertation presents an investigation of the static and dynamic behavior of microbeams and shallow arches excited electrostatically near their higher resonance modes. In the first part of the dissertation, we study the effect of partial electrode on the static and dynamic …
Controlling mechanical systems is an important branch of mechanical engineering. In this thesis, we will study the effect of delayed feedback controller on stabilizing MEMS resonators. Firstly, we apply a delayed feedback velocity controller on a MEMS resonator which is actuated…
Microelectromechanical systems (MEMS) are considered as potential candidates for "More-Moore" and "More-than-Moore" applications due to their versatile use as sensors, switches, and actuators. Examples include accelerometers for sensing, RF-MEMS capacitive switches in communicat…
The design and development of a second order MEMS sound pressure gradient sensor is presented in this dissertation. Inspired by the directional hearing ability of the parasitoid fly, Ormia ochracea, a novel first order directional microphone that mimics the mechanical structure …
First, this research presents experimental and theoretical investigation of the response of micro scale dual-plate thermal-piezoresistive resonators (TPR) and self-sustained oscillators (TPO) to different gases and pressures. It is demonstrated that the resonant frequency of suc…