In-situ mass spectroscopy is used to sense plasma deposition of silicon and silicon nitride to analyze gas phase reactant depletion, and the efficiency of silane conversion into the thin film. In-situ mass spectroscopy and mass balance modeling have been used to quantify deposit…
Using a variable temperature scanning tunneling microscope, we have studied several adsorbates on silicon surfaces. We have studied the adsorption characteristics of H\sb2S on Si(111)-(7 × 7). H\sb2S adsorbs dissociatively at sub-monolayer coverage, from 50 to 300 K, with HS bon…
A self-aligned process was developed for the fabrication of gated Si field emission devices with precise control on the gate-tip spacing, gate diameter, tip sharpness, and tip position. Emitter tips were etched in Cl\sb2 plasmas generated by electron cyclotron resonance and indu…
Aluminum based reactive nanomaterials have extensive applications in many fields including solid propellants, pyrotechnics, and catalytic reactions. One recent example is the novel concept of using nanostructured energetic particles for energy storage where the controlled exothe…
The flat panel display market requires new and improved technologies in order to keep up with the requirements of modem lifestyles. Electron field emission from thin film amorphous semiconductors is potentially such a technology. For this technology to become viable, improvement…
This PhD thesis presents the outcome of employing both nanosecond and femtosecond pulsed lasers in order to modify the surface structure of a material at the micro and nano scales. Literature review was carried out on micro/nano fabrication technologies involved in the semicondu…
Boiling heat transfer provides a means of removing high heat fluxes at low temperature differences in many applications in the power and process industries. A strong interest has been also developed for the cooling of silicon-based devices, such as electronic chips. However, a c…
A theoretical study of silicon-on-insulator (SOI) photonic wires was conducted. These nanoscale optical waveguides can have transverse dimensions substantially smaller than the wavelength of the infrared light they carry. This extreme confinement provides very strong dispersion,…
An alternative method for the growth of crack free, dislocation reduced III-Nitride layers on Silicon substrate has been developed that relies on formation of an ion implanted defective layer in the substrate with implantation taking place in the presence of AlN buffer layer. Th…
The research topics of the dissertation involve the design and the acoustic response prediction of MEMS silicon microphones. A directional microphone and an omnidirectional microphone were designed to meet the performance targets such as the desired sensitivity, frequency respon…
Recently there has been significant interest in incorporating molecular elements into electronic devices for electronics, memory, and chemical/biological sensing applications. To date much of the work on this topic has utilized metal electrodes however using silicon (Si) present…
The main focus of this study was placed on structure-property correlation in TiO2 and VO2 based epitaxial heterostructures where the photochemical and electrical properties were tuned through microstructural engineering. In the framework of domain matching epitaxy, epitaxial gro…
There has been extensive research in realizing large-scale integration of silicon (Si) photonics for long-haul communications, high-throughput optical interconnects, and future high performance computing (HPC). The impetus for this research lies in the fact that the silicon-on-i…
Recently emerged perovskite materials show superior features like high efficiency, defect tolerance, facile synthesis, bandgap tunability and wide color gamut over their rivals in photonics applications. On the other hand, metals have interesting characteristics as they go small…
Trivalent lantanit iyonlarının fotolüminesans özellikleri, tıbbi teşhis, hücre görüntüleme, güneş panelleri ve fonksiyonel nanomalzemeler gibi geniş uygulanabilirlikleri nedeniyle uzun yıllardır muazzam bir ilgi uyandırmaktadır. 3.8 eV geniş bir bant aralıklı olması sebebiyle La…