Ion Implantation

Ion Implantation

by Hirvonen, James Karsten

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Title Statements

  • Full title :Ion Implantation / ed.: James Karsten Hirvonen.

Edition Statements

  • Publication Date:1980.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York a.o
  • Language:eng
  • Publication Date:1980.

The Physical Object

  • Description:XIV, 502 Seiten : : fig.; Tabellen.

Edition Identifiers

  • ISBN:0123418186, 9780123418180
  • oclc:ocn636348347

Subjects

ANALYSE Aufsatzsammlung Dünne Schicht IMPLANTATION D'IONS (ÉLECTRODYNAMIQUE) ION IMPLANTATION (ELECTRODYNAMICS) Ionenimplantation IONENIMPLANTATION (ELEKTRODYNAMIK) Werkstoffkunde

Writers

Hirvonen, James Karsten

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