Ion implantation

Ion implantation

by Hirvonen, J. K.

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Title Statements

  • Full title :Ion implantation / edited by J.K. Hirvonen

Edition Statements

  • Publication Date:1980

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1980

The Physical Object

  • Description:xiv,495p : : ill ; : 24cm

Edition Identifiers

  • ISBN:0123418186, 9780123418180
  • oclc:on1151880551
  • Dewey Decimal:620.11

Subjects

Ion implantation Materials Science

Writers

Hirvonen, J. K.

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