Ion implantation

by Hirvonen, J. K, (James Karsten)

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Title Statements

  • Full title :Ion implantation / edited by J.K. Hirvonen.

Edition Statements

  • Publication Date:1980.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1980.

The Physical Object

  • Description:1 online resource (xiv, 502 pages) : : illustrations

Edition Identifiers

  • oclc:ocn565246282
  • LC Classification:TA403
  • Dewey Decimal:620.1/1/08 s

Subjects

Ion implantation Ions -- Implantation Materials -- Effect of radiation on Matériaux -- Effets du rayonnement sur

Writers

Hirvonen, J. K, (James Karsten)

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Files & Downloads

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