Ion implantation

Ion implantation

by Hirvonen, J. K.

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Title Statements

  • Full title :Ion implantation / edited by J.K. Hirvonen ...

Edition Statements

  • Publication Date:1980.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1980.

The Physical Object

  • Description:XIV, 502 p. : : il. ; : 24 cm

Edition Identifiers

  • ISBN:0123418186, 9780123418180
  • oclc:ocn802531105

Subjects

Efectes de les radiacions Ionització Materials

Writers

Hirvonen, J. K.

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