Microlithography: science and technology
by Smith, Bruce W. Suzuki, Kazuaki
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Book
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"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--
Read More ↓Title Statements
- Full title :Microlithography : science and technology / edited by Bruce W. Smith and Kazuaki Suzuki.
Summary
"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--
Read More ↓Edition Statements
- Publication Date:2020.
- Edition:Third edition
Publication Statements
- Publisher(s):CRC Press
- Place of Publication:Boca Raton
- Language:eng
- Publication Date:2020.
The Physical Object
- Description:pages cm
Edition Identifiers
- ISBN:9781439876756, 1439876754
- oclc:on1130322333
- LC Classification:TK7836
- Dewey Decimal:621.3815/31
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