Title Statements
- Full title :Semiconductor manufacturing technology / Chue San Yoo.
Edition Statements
- Publication Date:c2008.
Publication Statements
- Publisher(s):World Scientific
- Place of Publication:Hackensack, N.J
- Language:eng
- Publication Date:c2008.
The Physical Object
- Description:xii, 470 p. : : ill. ; : 24 cm.
Edition Identifiers
- ISBN:9789812568236, 9812568239
- oclc:on1166946642
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