Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

Type Book
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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:2000.
  • Edition:2nd ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach, Calif
  • Language:eng
  • Publication Date:2000.

Notes

Previous edition: 1986.

Contents: v. 1. Process technology.

The Physical Object

  • Description:890 pages : : illustrations ; : 25 cm

Edition Identifiers

  • ISBN:0961672161, 9780961672164
  • oclc:ocn810777527

Subjects

Circuits intégrés Integrated circuits Silicium Silicon

Writers

Wolf, Stanley Tauber, Richard N.

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