Title Statements
- Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Edition Statements
- Publication Date:2000-
- Edition:2nd ed
Publication Statements
- Publisher(s):Lattice Press
- Place of Publication:Sunset Beach, Ca
- Language:eng
- Publication Date:2000-
The Physical Object
- Description:v. 1-
Edition Identifiers
- ISBN:0961672161, 9780961672164
- oclc:ocn890493762
Subjects
Writers
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