Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measur…
This book provides a unified treatment of all Micro Electro Mechanical System (MEMS) design procedures. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What…
by Uhlmann, Eckart, Celis, Jean-Pierre, Cowan, Richard S., Fischer, Alfons, Gradt, Thomas, Groche, Peter, Kleinlein, Erich, Knoll, Gunter, Mang, Theo, Santner, Erich, Sturm, Heinz, Talke, Frank E., Winer, Ward O., Woydt, Mathias
